Abstract

Tungsten and nickel bimetallic nanoparticle is synthesized by radio frequency thermal plasma process which belongs to the vapor phase condensation technology. The morphology and chemical composition of the synthesized particle were investigated using the conventional nanoparticle transmission electron microscopy (TEM) sample. A few part of them looked like core/shell structured particle, but ambiguities were caused by either TEM sample preparation or TEM analysis. In order to clarify whether a core/shell structure is developed for the particle, various methodologies were tried to prepare a cross-sectional TEM sample. Focused ion beam (FIB) milling was conducted for cold-compacted particles, dispersed particles on silicon wafer, and impregnated particles with epoxy which is compatible with electron beam. A sound cross-sectional sample was just obtained from cyanoacrylate impregnation and FIB milling procedure. A tungsten-cored nickel shell structure was precisely confirmed with aid of cross-sectional sample preparation method.

Highlights

  • Multi-layer ceramic capacitor (MLCC) is composed of a ceramic dielectric layer and a metallic electrode layer

  • Nanoparticles were cold compacted in a rigid die mold at the normal pressure of 600 MPa and the cross-sectional transmission electron microscopy (TEM) sample was prepared by sitespecific Focused ion beam (FIB) milling

  • Tungsten and nickel bimetallic nanoparticle was synthesized by reactive radio frequency (RF) thermal plasma process from tungsten trioxide and nickel hydroxide blended micropowder

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Summary

Introduction

Multi-layer ceramic capacitor (MLCC) is composed of a ceramic dielectric layer and a metallic electrode layer. Miniaturization with higher performance has been persistently required and it is achieved by reducing the thickness of both dielectric layer and electrode layer. When it comes to the MLCC fabrication, conductive ink containing nickel nanoparticles is overlaid on dielectric green sheet by screen printing process and it is stacked and sintered simultaneously. In this regard, thinner layer thickness is obtained by reducing the nickel particle size [3,4]. The discrepancy in the sintering temperature is further enhanced with nickel by reducing the particle size

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