Abstract
The possibilities of determining the parameters of biaxially anisotropic ultrathin dielectric films on transparent isotropic substrates by differential reflectance and ellipsometric measurements are analyzed. The analysis is based on analytical reflection formulas obtained in the framework of a long-wavelength approximation. It is shown that it is possible to simultaneously determine the thickness and all six parameters of anisotropy for such films. The accuracy of the obtained analytical formulas for determining the parameters of anisotropic ultrathin films is estimated by computer simulations where the reflection problem was solved numerically on the basis of the rigorous electromagnetic theory for anisotropic layered systems.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
