Abstract
Digital holographic microscopy is a promising method for measuring complex micro-structures with high slopes. A quasi-common path interferometric apparatus is adopted to overcome environmental disturbances, and an acousto-optic tunable filter is used to obtain multi-wavelength holograms. However, the phase shifting error caused by the acousto-optic tunable filter reduces the measurement accuracy and, in turn, the reconstructed topographies are erroneous. In this paper, an accurate reconstruction approach is proposed. It corrects the phase-shifting errors by minimizing the difference between the ideal interferograms and the recorded ones. The restriction on the step number and uniformity of the phase shifting is relaxed in the interferometry, and the measurement accuracy for complex surfaces can also be improved. The universality and superiority of the proposed method are demonstrated by practical experiments and comparison to other measurement methods.
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