Abstract
Data processing for three-dimensional analysis by microprobe Rutherford backscattering (RBS) was studied to form real images of multilayered structures. Bilayered Au stripes on Si were analyzed by a 400 keV He+ microprobe. Unprocessed mapping and tomographic images of the inner Au layer showed wavy shapes due to the energy loss of probe beams in the outer Au layer. A set of 8192 RBS-spectra corresponding to a measured frame of 128×64 points was processed by evaluating amounts of Au and the energy loss in the outer Au layer. The inner Au images were successfully corrected after the processing.
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