Abstract
We have investigated the modification of the microstructure and magnetic properties of Co/Pt multilayer films with various layer structures using ion beam irradiation. Cr/[Co/Pt] multilayer films prepared by a magnetron sputtering deposition on a surface oxidized Si substrate were irradiated by 30 keV Kr+ ion beam with various ion doses from 1×1014 to 5×1015 ions/cm2. The modifications of magnetic properties and microstructures due to Kr+ ion irradiation depended on Co/Pt layer structures. The as-prepared [Co(0.4 nm)/Pt(0.45 nm)]15 multilayer films were confirmed to exhibit the square shaped M-H loop and the perpendicular easy axis with a saturation magnetization of 620 emu/cc and coercivity of 1.1 kOe. After the irradiation with ion dose of 5×1015 ions/cm2, the easy axis changes from perpendicular to in-plane direction. The coercivity and saturation magnetization decrease down to 2% and 13% of its original values, respectively. The decrease of coercivity and saturation magnetization is due to the implantation of the Cr atom in the top most layers into Co/Pt multilayer films caused by Kr+ ion irradiation, as confirmed from Auger electron spectroscopy (AES) depth profiles.
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