Abstract
In this study, the micropore shape of two-dimensional (2D) photonic crystal structures can be modified and controlled by the intensity ratio of the incident beams of the holographic lithography. By adjusting the intensity ratio of the incident beams, the micropore shape of 2D hexagonal photonic crystal structure could be adjusted from being circular to being elliptical. Hence, we defined and analyzed the ellipticity of the micropore shape on a 2D photonic crystal structure as a function of the intensity ratio of the incident beams. In addition, we set up an optical holographic system by using three incident beams with different intensities to demonstrate the influence of the intensity ratio of the incident beams on the micropore shape. The optical experimental results show that the ellipticity of the micropore shape decreased with increasing the intensity ratio of the incident beams, which is the same trend as with the theoretical analysis.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
