Abstract
Periodic microgrooves on Si wafer induced by interfered femtosecond laser pluses using biprism are reported. Shape of microstructures is controlled by laser fluence, scanning numbers, and base angle of biprism. Tribological property changes by microgrooves.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
