Abstract
Terahertz metamaterial structures that employ flexing microelectromechanical cantilevers for tuning the resonance frequency of an electric split-ring resonator are presented. The tuning cantilevers are coated with a magnetic thin-film and are actuated by an external magnetic field. The use of cantilevers enables continuous tuning of the resonance frequency over a large frequency range. The use of an externally applied magnetic field for actuation simplifies the metamaterial structure and its use for sensor or filter applications. A structure for minimizing the actuating field is derived. The dependence of the tunable bandwidth on frequency is discussed.
Highlights
Since their conceptual inception [1], most of the work on metamaterials has been motivated by the possibility to design their characteristics to exhibit behavior not usually possessed by natural materials [2]
We present a novel approach that transforms the metamaterial structure to incorporate conventional microelectromechanical (MEMS) single-edge-fixed cantilevers into split-ring resonators [31]
The calculations regarding the bending that can be achieved by a magnetic field demonstrates that for realistic device dimensions, magnetic layer thickness and magnetic field of the cantilever beam can be bent enough to affect a large tuning range
Summary
Since their conceptual inception [1], most of the work on metamaterials has been motivated by the possibility to design their characteristics to exhibit behavior not usually possessed by natural materials [2]. The extension of the metamaterial research to terahertz frequencies has opened up possibilities for new applications whose technological importance has been a strong motivating factor [12,13,14,15,16]. The presence of resonances of several biological molecules in the terahertz range of frequencies makes sensors an especially important application area [17, 18]. Structures that can be used as sensors and structures which can be used for spectroscopic analysis have been under intense development [18, 19]
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