Abstract

Semiconductor III–V photonic crystal (PC) laser is regarded as a promising ultra-compact light source with unique advantages of ultralow energy consumption and small footprint for the next generation of Si-based on-chip optical interconnects. However, the significant material dissimilarities between III-V materials and Si are the fundamental roadblock for conventional monolithic III-V-on-silicon integration technology. Here, we demonstrate ultrasmall III-V PC membrane lasers monolithically grown on CMOS-compatible on-axis Si (001) substrates by using III-V quantum dots. The optically pumped InAs/GaAs quantum-dot PC lasers exhibit single-mode operation with an ultra-low threshold of ~0.6 μW and a large spontaneous emission coupling efficiency up to 18% under continuous-wave condition at room temperature. This work establishes a new route to form the basis of future monolithic light sources for high-density optical interconnects in future large-scale silicon electronic and photonic integrated circuits.

Highlights

  • Semiconductor III–V photonic crystal (PC) laser is regarded as a promising ultra-compact light source with unique advantages of ultralow energy consumption and small footprint for the generation of Si-based on-chip optical interconnects

  • Epitaxial growth and optical characterisation of quantum dots (QDs) PC lasers. 3D finite-difference time-domain (FDTD) methods were used to optimise the structural parameters in order to obtain a high-Q resonance within the QD ground state gain spectrum (Supplementary Fig. 1)

  • The InAs/GaAs QD density is estimated to be ∼4 × 1010 cm−2 with a typical size of 25 nm in diameter and 8 nm in height, determined by the atomic force microscope (AFM) and transmission electron microscope (TEM) images shown in Fig. 1e and Fig. 1c, respectively

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Summary

Introduction

Semiconductor III–V photonic crystal (PC) laser is regarded as a promising ultra-compact light source with unique advantages of ultralow energy consumption and small footprint for the generation of Si-based on-chip optical interconnects. Even though high-performance Fabry-Perot and distributed feedback lasers integrated on Si are extensively studied[9,10], seeking a method to decrease the volume of the laser cavity and active region, and reduce the operating energy is another task to realise more energy-efficient Si-based photonic integrated circuits (PICs). In this regard, nanoscale PC cavity with high-quality-factor (Q-factor), ultrasmall mode volume (Vmode) and large Purcell factor (proportional to Q/Vmode) is one of the most promising architectures for integrated nanoscale devices, with the advantage of ultralow energy consumption as a result of enhanced light-matter interaction[11,12]. QD active region on the high crystal quality buffer layer is the key to achieve PC lasers monolithically grown on a Si substrate

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