Construction of microfluidic biochips with enhanced functionalities using 3D femtosecond laser direct writing

Abstract

The extreme nonlinear interaction betweenfemtosecond laser pulses and large-band-gapmaterials has enabled three-dimensional (3D)microfabrication inside transparent materials. In thepast decade, this technique has been used forcreating a variety of functional components in glassmaterials, including microoptics, microfluidics,microelectronics, micromechanics, etc. Using thesebuilding blocks, femtosecond laser microfabricationalso allows for construction of highly integratedmicrodevices. Here, we provide an overview of ourlatest progress made along this direction, includingfocal spot engineering and nanofluidic fabrication.In particular, we show that 3D micro-/nano-fluidiccomponents with arbitrary geometries can bedirectly formed inside glass. This opens uppromising prospects for a broad spectrum ofapplications based on compact and complex 3Dmicrofluidic networks. Our work shows that thistechnique holds promise for fabricating 3D hybridmicro-systems, such as Lab-on-a-chip devices andMicro Total Analysis Systems in the future.