Abstract
The main objective of this study aims at multiple-input multiple-output (MIMO) process mode. Based on the integrated concepts of statistical process control (SPC) and engineering process control (EPC), soft computing (SC) technique and statistical analysis technique are combined to modularize the relationship between process output and process input, so optimal yield can be derived and process quality can be improved. This study intended to construct a MIMO process control system with soft computing methods for prediction and parameter control and detailed the internal operation for each sub-system and relationship among one another. Besides correct prediction and diagnosis for the noise due to system deviation, it effectively controls process input and output as well as achieves process optimization.
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