Condition assessment and fault prognostics of microelectromechanical systems

Abstract

Microelectromechanical systems (MEMS) are used in different applications such as automotive, biomedical, aerospace and communication technologies. They create new functionalities and contribute to miniaturize the systems and reduce their costs. However, the reliability of MEMS is one of their major concerns. They suffer from different failure mechanisms which impact their performance, reduce their lifetime and their availability. It is then necessary to monitor their behavior and assess their health state to take appropriate decision such as control reconfiguration and maintenance. These tasks can be done by using Prognostic and Health Management (PHM) approaches. This paper addresses a condition assessment and fault prognostic method for MEMS. The paper starts with a short review about MEMS and presents some challenges identified and which need to be raised to implement PHM methods. The purpose is to highlight the intrinsic constraints of MEMS from PHM point of view. The proposed method is based on a global model combining both nominal behavior model and degradation model to assess the health state of MEMS and predict their remaining useful life. The method is applied on a microgripper, with different degradation models, to show its effectiveness.