Computerized scanning Auger microprobe

Abstract

An Auger spectrometer has been automated using a microcomputer. Fundamental considerations in the design and choice of the computerized system are presented and should be of general interest. The spectrometer was a Physical Electronics Ind. model 545 scanning Auger microprobe. The microcomputer chosen was a Southwest Technical Products 6809 computer system. Hardware details are discussed with emphasis on the four computer–spectrometer interface boards. These boards are (1) Auger energy control board, which sets the Auger detection energy with its 16 bit digital-to-analog converter (DAC); (2) read Auger signal board, which reads the Auger signal intensity with its 12 bit analog-to-digital converter; (3) multipurpose DAC board, which uses two pairs of 8 bit DAC’s to position the excitation beam and display the data in memory on a CRT monitor, and (4) timing and relay control board, which selects various instruments and power supplies as required during the fully automated depth profiling sputter sequences. Organizational details of the control, analysis, and output software are discussed. The operation of the main Auger control program is emphasized along with its menu driven options, which provide great versatility to the operator. Examples are shown of the various data output modes, which include displays on the CRT monitor and plots from the multicolor digital plotter.