Abstract
Structural analysis by the measurement of carbon K-edge near-edge X-ray absorption fine structure (NEXAFS) using synchrotron radiation was performed on 23 types of silicon-containing diamond-like carbon (Si-DLC) film fabricated by various synthesis methods. In addition, elementary composition in the Si-DLC films was determined by the combination of Rutherford backscattering spectrometry (RBS) and elastic recoil detection analysis (ERDA) using an electrostatic accelerator. In the C K-edge NEXAFS spectra of Si-DLC films, the σ* band shrunk and shifted to the lower-energy side, and the π* peak broadened with increasing silicon content in the Si-DLC film. The observed NEXAFS spectra of Si-DLC films were classified into four types.
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