Abstract
Transition metal nitrides (ZrNx, NbNx, MoNx) were deposited by reactive d.c. magnetron sputtering. Coating properties such as morphology, composition, phases, lattice parameter and hardness were determined as a function of parameter variation (sputtering atmosphere, substrate temperature, bias). Composition and deposition rate can be correlated with the position of the metals in the periodic system of the elements. The reactivity decreases in the order zirconium, niobium, molybdenum, i.e. with increasing group number from IVa to VIa.
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