Abstract
We achieved parallel nanoscale patterning of ferroelectric complex oxides by pulsed laser deposition through a nanostencil (i.e., through a pattern of apertures in a thin free-standing membrane). Ordered arrays of nanostructured barium titanate (BaTiO3) were obtained onto different substrates in a single deposition step, at room temperature, replicating accurately the aperture patterns in the stencil membrane. After a postdeposition annealing treatment, x-ray diffraction pattern showed a nanocrystalline BaTiO3 structure close to the perovskite cubic phase with grains 30–35nm in size. Their local ferroelectric properties were detected using piezoresponse force microscopy.
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