Abstract
The reduction of temperature effect is crucial for high-precision MEMS accelerometers. This study presents an automatic real-time compensation method for reducing the temperature effect on the scale factor of force-balanced MEMS accelerometers. Thermistors with negative temperature coefficient are connected in series to the circuit for counteracting the thermal responses of the accelerometers. The compensation system is theoretically analysed, predicting an optimal working temperature with zero-temperature coefficient that agrees with the experimental results with a confidence level of 99.73 %. The temperature effect on the scale factor is reduced from 419 ppm/°C to ±8 ppm/°C at the working temperature with a variation of ±0.5 °C. Compared with other works, the proposed method has advantages on simplified procedures, high efficiency and improved resource utilization, which is promising to large-scale applications in industrial sensors.
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