Abstract

Characterized by excellent material properties such has high mechanical, thermal and chemical stability technical ceramics such as ZrO2, SiC, Si3N4 and AlN are increasingly being used for various applications. Traditional means of machining sintered ceramics are expensive and limited by geometry. Electrical discharge machining (EDM) is an electro-thermal machining process used to structure conductive materials. By applying a conductive layer (denoted as assisting electrode) on top of the non-conductive material, the EDM process can also be used to structure insulating ceramics. This paper presents a comparative study on the major machining parameters affecting the µEDM process of non-conductive SiC, ZrO2, Si3N4 and AlN ceramics. The influence of five major machining parameters (current, open-circuit voltage, gap voltage, duty-cycle and servo) over two responses (material removal rate (MRR) and tool wear rate) is investigated for each ceramics material. The underlying reason for the variation in the MRR among the different ceramics is examined by comparing the material properties. Melting point of the ceramics material has an effect on the MRR for the µEDM of different ceramics. The bulk resistance value of the ceramic material does not have an influence on the MRR for the µEDM of different ceramics. Scanning electron microscope (SEM) images of the cross section of the unprocessed and µEDM processed surface of these ceramics have been analyzed. The SEM micrographs show that the µEDM process does not affect the ceramics bulk. It also confirmed spalling as one of the dominant material removal mechanism for ZrO2 ceramics.

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