Abstract
Using a radio frequency remote plasma deposition process, hydrogenated amorphous carbon thin films were prepared from a variety of hydrocarbon precursors. Monomers were aliphatic chains (butane, trans-2-butene), rings (ethylcyclohexane), or aromatics (styrene, ethylbenzene), mixed with hydrogen. These films were elaborated in order to be used in inertial confinement fusion experiments with the future megajoule laser. Thickness and roughness were studied and optimized in relation of plasma parameters. Structural properties were analyzed by Fourier transform infrared, Raman diffusion, and others.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
