Abstract
The possibility to develop the electron-and-ion energy analyzer and mass spectrometer combined in one optical system for the investigation of the properties of solids has been considered. This device allows one to obtain information on the chemical composition and energy spectrum for all the particles emitted by the surface of a solid subjected to various effects in one experiment. The combined spectrometers are based on the source of the particle flux, which transforms the mass spectrum into the energy spectrum due to the effect of electric-field pulses on the ion flux, and the high-resolution electrostatic energy analyzer. The particles appear in the source as a result of the interaction of the exciting radiation from an independent source with the surface of the solid under study. The type of exciting radiation (fluxes of ions, atoms, electrons, and laser radiation) is chosen depending on the goals of the study. Numerical modeling of the device operation, which confirms the possibility of its implementation in the form of a compact informative system for the investigation of characteristics of solids, has been performed.
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