Collision-induced dissociation and charge-transfer reactions of SiFx+ (x = 1-4). Thermochemistry of SiFx and SiFx+

Abstract

Guided ion beam mass spectrometry is used to measure cross sections as a function of kinetic energy for interaction of SiF x + (x=1-4) ions with Xe. Energy dependences of the collision-induced dissociation cross sections are analyzed to yield the following 0 K bond dissociation energies (BDEs): D(SiF 3 + -F)=0.85±0.16 eV, D(SiF 2 + -F)=6.29±0.10 eV, D(SiF + -F)=3.18±0.04 eV, and D(Si + -F)=7.04±0.06 eV. The ionization energies, IE(SiF 2 )=10.84±0.13 eV and IE(SiF 3 )=9.03±0.05 eV, are also measured from analysis of endothermic charge transfer reactions