Abstract
We show that an x-ray interference phenomenon, coherent grating x-ray diffraction (CGXD), can be used to study lateral nanostructure arrays on crystal surfaces and interfaces. Compared to Fraunhofer grating diffraction of visible light, x-ray grating diffraction contains information not only about geometric profiles of the surface but also about the internal crystalline structures and lattice strain distributions in the grating features. The grating diffraction pattern can also be measured in a white-beam Laue method using highly collimated polychromatic synchrotron radiation, which provides a parallel data collection scheme and may be useful in in situ studies on evolution of nanostructure arrays.
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