半導體化學機械研磨(CMP)廢水之回收再利用評估

Abstract

Due to the lack of water resources becoming a global concern, this study will delve into the possibility and analyze the economic effect of systemically reclaiming and reusing CMP wastewater, considered to be highly recycle-valuable, produced mainly by the semiconductor industry. This study will create an optimization model which should take into consideration not only the balance of water system, but also legal policies such as internalization of external cost and economic incentives. The main structural formula is based on the case data and shall be represented in the simplest way possible. Other than the water utility cost and wastewater management cost typically found in the general industrial water expenses, this study also includes wastewater pollution penalty to be a major formula. As a result, the final structure for the estimation of the semiconductor CMP wastewater Reclamation and Reuse system cost comes out to be water utility + wastewater management + wastewater pollution. Other than these three major formulas, other minor equations will be formed specifically for each individual case. The advantages of the optimization model used by this study are its real-time property, feasibility evaluation and exclusiveness. Such model simulates results that optimize the consequences of deploying the wastewater Reclamation and Reuse system. Based on the fixed Reclamation coefficient, we can come up with the “Quantity & Cost correlation graph.” This graph provides the semiconductor manufacturers the ability to make better decisions, based on the total water expenditures, when facing unexpected problems or emergencies. On the other hand, from the fixed quantity we can come up with the “Reclamation coefficient & Cost correlation graph,” which lays out the feasibility of deploying such system based on the cost trend: if the cost is higher than the proposed income, this system will prove to be nothing but a liability to the manufacturers. As a result, the major contributions of this study are instantaneous contingency plan and economic assessment it offers to the manufacturers in semiconductor industry who plan to use CMP wastewater Reclamation and Reuse system. After all, due to the constrained global resources, water price is bound to soar. Also, since there is yet a wastewater discharge penalty domestically, Reclamation and Reuse system for wastewater is definitely the way to go, especially companies such as semiconductor manufacturers who utilize massive amount of water relative to others. Therefore, the assessment to adopt such a system becomes their biggest and more important issue at hand.