Abstract

This note reports on the noise of CMOS devices. It is shown experimentally that a weak boron threshold implant (∼1012 cm−3) can influence the 1/f noise levels. For wafers with threshold adjustment the p-channel noise decreases whilst the n-channel noise increases. The changes in the n/p noise ratio with/without threshold implantation are predicted using a simple model in conjunction with carrier profile simulations.

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