Abstract
Thin BC2N films have been obtained by chemical vapour deposition (CVD) from BCl3 and CH3CN. The layers were two types according to their appearance: metallic and black. The differences in their morphology, structure and composition were studied by scanning electron microscopy. X-ray diffraction and X-ray photoelectron spectroscopy. Metallic BC2N films were subjected to laser-induced etching with SF6 using copper bromide vapour laser. The etch depths increased with the increase of laser power and SF6 pressure, and with the decrease of scanning speed. The maximum etch rate was 120 μm s★ at 2 W laser power. 100 kPa SF6 and 400 μm s★ scanning speed.
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