Abstract
A model is presented for calculating trajectory deflections of sputtered particles due to the incident beam electrostatic field. The resultant deflection of particles prior to detection makes the sputtering current density a significant parameter in analysis of the angular distribution and energy of sputtered particles. Thus it is probable that the higher average energies of sputtered ions generally found (in comparison with neutral particle energies) is partially a result of detector discrimination against particles of a few eV. Angular corrections are given for the most important sputtered energy range up to 20 eV.
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