Abstract
A comparative characterization study of diamond and diamond-like carbon (DLC) films deposited using plasma-enhanced chemical vapour deposition is presented. The films were examined using scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES) and Raman spectroscopy. As a result of these studies structural and chemical information was obtained on the carbon films. The SEM examination indicated the presence of high levels of stress in the diamond films. The ability of XPS and Raman spectroscopy to distinguish between diamond-type carbon (sp 3 hybridized) and graphitic carbon (sp 2 hybridized) is demonstrated.
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