Abstract
To date, the exact nature of the plasma nitriding mechanism and the role of energetic particle bombardment are not well understood. The purpose of this work has been to obtain a more detailed knowledge about the evolution of the plasma nitrided surface layer as a function of the energy of the bombarding particles. Nitrided layers were produced at the surface of pure titanium specimens at various flux energies by Intensified Plasma-Assisted Processing (IPAP), a triode plasma technique developed in our laboratory. X-ray Absorption Near Edge Structure (XANES) spectroscopy and Extended X-ray Absorption Fine Structure (EXAFS) spectroscopy were used to characterize the local structure of the titanium nitride layers. Cross sections of the processed specimens were studied by Auger electron spectroscopy and electron microscopy. The results showed that increasing flux energy promotes the formation of a well-ordered TiN layer at the surface. Low flux energies produce significantly lower fractions of the TiN phase at the surface, as well as thinner nitrided layers. A structural model was suggested and quantitatively tested based on the XANES and EXAFS measurements.
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