Abstract
In this paper, we report the microwave properties of finite-ground coplanar waveguides (CPWs) fabricated on a thermally oxidized high resistivity silicon substrate. The ultralow metallization thickness indicates a gold metallization with a thickness in the range from 10 to 100 nm. We present measured magnitudes and phases of the $S_{11}$ and $S_{21}$ parameters of the CPW segments in the frequency range from 0.1 to 26 GHz, which are transformed based on the signal flow graph to the characteristic impedance $Z_{0}$ , the attenuation coefficient $\alpha $ , and the effective dielectric constant $\varepsilon _{\mathrm {eff}}$ . We analyze the CPW attenuation dependence on the metallization thickness based on the $\alpha (f) =\alpha _{0}\cdot (f/1~\text {GHz})^{n}$ model.
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