Abstract

Thin films of cadmium indate were deposited onto the glass substrates by employing dc magnetron sputtering from cadmium–indium alloy target under various substrate temperatures in the range 373–673 K. The films were characterized by studying their structural and electrical properties. The films formed at substrate temperature <423 K were amorphous while those deposited at ≥423 K were polycrystalline with cubic spinel structure. The films prepared at a substrate temperature of 673 K exhibited low electrical resistivity of 3.5 × 10 −4 Ω cm and Hall mobility of 29 cm 2/V s.

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