Abstract

The high integration and high density of semiconductor packages are generating increased heat in electronic devices, leading to issues such as reduced lifespan and malfunctions in electronic devices. In response, research on thermal interface materials is being conducted to address heat generated from heat sources, and various studies, particularly those applying carbon nano tube, are notable in this regard. However, in the case of carbon nano tube, there are challenges in industrial application due to the occurrence of cohesive forces through van der Waals interactions. Therefore, in this study, the characteristics were analyzed through the formation of carbon nano tube carboxyl groups (–COOH) and the synthesis of aluminum oxide via chloride (–COCl) formation. After the chloride process, a functional group –COCl was confirmed at 430 cm−1. It was confirmed that the electrical properties were improved as a result of the CNT, CNT carboxyl, and chloride process. It is believed that the electrical properties improved as impurities were removed during the acid treatment process. In addition, it is believed that the electrical properties were improved due to the increase in intermolecular forces between CNTs. Through this, it is determined that the application of carbon nano tube and aluminum oxide composite materials can be highly beneficial for thermal conductivity heat dissipation filler applications.

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