Abstract
Ion implantation method is applied to synthesize B–C–N hybrids and their electronic structures are characterized by x-ray photoelectron spectroscopy. A boron nitride film is deposited on a graphite target by borazine plasma implantation. At the interface between the BN film and the graphite, a variety of bonding combinations including B–N, B–C, and C–N are observed. This proved that B–C–N hybrids are formed by this method.
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More From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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