Characterization of a linear venetian-blind macroparticle filter for cathodic vacuum arcs

Abstract

The cathodic vacuum are is a simple means of creating a highly ionized metal or carbon plasma, which can be used to produce a wide variety of metal and metal compound thin films. In order to produce smooth, defect-free films suitable for optical and electronic applications, the plasma needs to be filtered of micrometer-sized molten and solid cathode debris known as macroparticles. To date, most of the research effort on plasma filtering has been focused on development and optimization of magnetic filter designs based on curved solenoids. Ryabchikov et al. (1998) proposed and employed novel filter designs for a combined plasma and ion beam source. The new designs are based on a nested set of conical plates in one version and a set of angled plates (venetian blind) in another. We report on a detailed characterization of the operation of a filter employing a linear venetian blind geometry. The effects of parameters such as plate and arc currents, as well as plate bias on the throughput and deposition profile are reported.