Abstract
We proposed a sensitive sensor design by integrating a circular-hole defect with an etched diffraction grating (EDG) spectrometer based on amorphous silicon photonic platforms. The air circular-hole can be optimized to present strong resonant scattering at some special wavelengths. The influence of the diameter and the position of the circular-hole defect on the performance of spectrometer-on-chip sensor have been studied numerically by an accurate boundary integral method. With an appropriate defect diameter, the sensor chip can contribute to ~ 10000 nm/RIU sensitivity and an acceptable fabrication tolerance.
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