Abstract
The manufacturing process of polysilicon feed stock material is discussed. The sources of quartz, which is the raw material, and its processing methods are presented. The process of conversion of quartz to metallurgical-grade silicon is discussed. Direct cholorination and hydrochlorination methods of the Seimens process for the production of trichlorosilane using metallurgical-grade silicon is discussed. The Siemens CVD process of polysilicon production is described. The FBR process of granular polysilicon and upgraded metallurgical-grade silicon are presented and trichlorosilane merits and demerits of the processes are discussed.
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