Abstract
The electrical property of SnO 2 thin film was improved by the incorporation of multi-wall carbon nanotubes (MWNTs). MWNTs were incorporated into SnO 2 photosensitive precursor solution and the direct-patternable film was prepared by photochemical metal-organic deposition. The incorporation of MWNTs into SnO 2 films slightly reduced the transmittance of SnO 2 films due to light scattering by the incorporated MWNTs. In addition, with incorporation of MWNTs, the crystallinity of the SnO 2 hybrid films decreased slightly and the film sheet resistance improved due to enhancement of charge mobility because of the π-bonding nature of MWNTs. Direct-patterning of SnO 2 hybrid films containing MWNTs was performed without photoresist or dry etching. These results suggest that a micro-patterned system can be simply fabricated at a low cost and the electrical properties of SnO 2 films can be improved by incorporating MWNTs.
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