Abstract
In the present work we have investigated the influence of different parameters that determine the C deposition on a Si target. Among them we have studied the pressure of the irradiation chamber, the implantation fluence, the current density, the target temperature, the energy of the beam, the charge state of the ion, the ion species and the molecular state of the irradiation beam. In order to determine the quantity of C deposited on the Si substrate we have used the Rutherford backscattering/channeling technique together with the resonant C12(α,α)12C reaction. After careful analysis we arrived at the conclusion that the real independent parameters are the pressure of the irradiation chamber, the temperature of the target, the irradiation time and the electronic stopping power of the ion–target combination.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
