Abstract
We present a micromachined cantilever with an integrated high-bandwidth resonator for direct measurement of tip-sample interaction forces in tapping-mode atomic force microscopy. Force measurements are achieved by a diffraction grating that serves as a differential displacement sensor for the tip motion relative to the cantilever body. Time-resolved tip-sample interaction force measurement is demonstrated on a silicon sample following calibration of the probe structure. By using lock-in detection, the harmonics of periodic tip-sample interaction have been utilized to obtain high-contrast, material specific images. The harmonic images of patterned silicon/silicon nitride control samples and triblock copolymers are presented.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
