Abstract
Diamond-like carbon thin films on n-type single crystal silicon and quartz substrates were grown by XeCl excimer pulsed laser deposition (PLD) at room temperature using camphoric carbon target. The soot for the target was obtained from burning camphor (C 10H 16O), a natural source. Characteristics of the deposited films were investigated using Raman, optical absorption and electron spin resonance (ESR) analyses. The results are compared with those for the film obtained by using conventional graphite target and their differences are discussed. Structural and optoelectronic properties along with its very high deposition rate reveal the superiority of camphoric carbon film and thereby, establishes camphoric carbon as a better alternative to graphite target in pulsed laser deposition.
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