Abstract
Optimization of advanced mechanical sensor structures can hardly be achieved on an intuitive basis. Therefore, extensive use was made of computer-aided design (CAD) tools in the design stage of a recently developed capacitive-type pressure sensor. The mechanical behaviour of the micro-machined membrane structures is evaluated using powerful commercial finite-element software. A dedicated software-extension, ‘CAPSIM’, has been developed to yield the output response of the capacitive pressure sensors as a function of applied pressure and design parameters. Feature include trapped-gas effects and evaluation of stress-concentrations due to anisotropic etching. A novel diaphragm structure, with a rigid centre part, is shown to increase both sensitivity and linearity substantially.
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