Abstract
Worm-like buckling structures have been investigated by atomic force microscopy to estimate the relevant parameters for the mechanical stability of Y2O3 thin films deposited by ion beam sputtering technique on GaAs substrates. The internal stresses involving in the observed buckling phenomena have been estimated to be around 8.5 GPa in compression. The critical thicknesses up to which the various damaging mechanisms occur have also been determined.
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