Abstract
For plasma processes one wants a large diameter and long life ion source. A filamentless ion source is desired when using reactive gases. We examined microwave plasma regarding its capability as an electron source and succeeded in extracting an electron current in the ampere range from the plasma. Then we developed a bucket type ion source using a microwave plasma cathode which replaces the conventional filament.
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More From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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