Abstract
We reported the fabrication and optical analysis of titanium dioxide (TiO2) nanostructures by a glancing angle deposition (GLAD) method using an electron-beam evaporator with various incident vapor flux angles (θα). The GLAD TiO2 layers were grown on silicon and glass substrates. The GLAD TiO2 films with nano-columnar structures were formed at various θα = 0, 40, 60, and 80°. The structural properties of the GLAD TiO2 layers were evaluated, creating slanted porous columnar structures due to the self-shadow effect. As the θα was increased during the evaporation, the effective refractive index of the GLAD TiO2 layers was decreased and their average transmittance was increased in the wavelength range of 300–1000 nm due to the decreased average reflectance, together with theoretical calculations. For photovoltaic device applications, one pair of TiO2 layers with θα = 0 and 80° was produced using optical quarter wavelength thicknesses, exhibiting the lowest reflectance value of 6.67% at the wavelength of 540 nm. The highest solar weighted transmittance was also calculated to be 89.6% for the GLAD TiO2 layer at θα = 80° in the wavelength range of 300–1100 nm.
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