Abstract
Gal spectral lines originating from the sputtering of GaAs under 6–10 keV Ar + ion bombardment have been studied. Results of the measurements on the target position, beam current and projectile energy dependences of 4172, 4033 and 2944 Å lines are presented. It is found that the secondary photon emission yields can be well described by the model proposed by Wright and Gruen.
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