Abstract
Angular acceleration sensors are attracting attention as sensors for monitoring rotational vibration. Many angular acceleration sensors have been developed; however, multiaxis measurement is still in a challenging stage. In this study, we propose a biaxial angular acceleration sensor with two uniaxial sensor units arranged orthogonally. The sensor units consist of two rotational-symmetric spiral channels and microelectromechanical system (MEMS) piezoresistive cantilevers. The cantilever is placed to interrupt the flow at the junctions of parallelly aligned spirals in each channel. When two cantilevers are used as the resistance of the bridge circuit in the two-gauge method, the rotational-symmetric spiral channels enhance the sensitivity in the target axis, while the nontarget axis sensitivities are canceled. The fabricated device responds with approximately constant sensitivity from 1 to 15 Hz, with a value of 3.86 × 10−5/(rad/s2), which is equal to the theoretical value. The nontarget axis sensitivity is approximately 1/400 of the target axis sensitivity. In addition, we demonstrate that each unit responds according to the tilt angle when the device is tilted along the two corresponding rotational axis planes. Thus, it is concluded that the developed device realizes biaxial angular acceleration measurement with low crosstalk.
Highlights
Angular motion is one of the most significant parameters for controlling and navigating the attitude of a mobile object [1,2,3]
The differential pressure caused by the angular acceleration is theoretically calcuAs shown in the enlarged view in Figure 2(b-ii), we focus on a small section of the spiral lated
Each curve is a sinusoidal curve multiplied by the differential pressure, as angular acceleration is applied to the target axis axis in each sensor unit
Summary
Angular motion is one of the most significant parameters for controlling and navigating the attitude of a mobile object [1,2,3]. It has been difficult to achieve both a compact size and high sensitivity for a ring channel angular acceleration sensor To solve this problem, a spiral channel was utilized instead of a simple ring channel to amplify the inertial force and improve the sensor sensitivity [22]. If a mirror-symmetric structure is applied to a spiral channel, a uniaxial angular acceleration sensor can be realized with significantly high independence in principle. This sensor structure can be utilized for the sensor unit of a multiaxial angular acceleration sensor. We demonstrate the sensor response when the sensor is tilted at a certain angle to the rotating surface
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