Abstract
The decay in the oscillatory amplitude of diffraction intensity from an epitaxial growth front is due to the buildup of a multilevel step structure. This can occur as a result of kinetic limitations when the substrate temperature is sufficiently low or the deposition rate is very high so that thermal equilibrium cannot be ochieved during growth. Another mechanism that can lead to a multilevel growth front is the existence of a step edge barrier at the steps so that deposited atoms cannot diffuse "downward" at the step edge which leads to a mound like structure. In this paper we describe the characteristics of the diffraction intensity angular profile from the initial layer-by-layer structure to the final multilevel structure. A particular emphasis will be placed on the characteristics of the reciprocal space structure when the amplitude of the intensity oscillation decays to zero.
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