Abstract
In this paper we present behavioral modeling of a monolithically integrated three-axis capacitive accelerometer using the standard MetalMUMPs process. The behavioral modeling is done in order to verify the design with respect to structural and electrostatic performance of the designed three-axis capacitive accelerometer. The proposed accelerometer is 3.2 mm × 3.5 mm in size, designed for sensing the acceleration of 25 g in three axes. The mechanical noise floor for in-plane ( x and y) and out-of-plane ( z) axes is 0.291, 0.316, and 2.84 µ g/√ (Hz), respectively. The total sense capacitance along the x, y, and z axes is 68.5 fF, 100 fF, and 6.19 pF, respectively. Sensitivity of 2.568 fF/ g, 4 fF/ g, and 0.252 pF/ g is obtained for in-plane ( x and y) and out-of-plane ( z) axes, respectively. The resonance frequency for the designed accelerometer is 800 and 2500 Hz for in-plane and out-of-plane axes, respectively. The results obtained by behavioral modeling are compared with the analytical results, which are approximately the same.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
