Abstract
Miniaturized hexapod MEMS microrobots with two kinds of actuators were described in this paper. The actuator of MEMS microrobots had two types which were shape memory alloy (SMA) actuator and piezoelectric (PZT) actuator. For PZT type microrobot, a piezoelectric element was affixed outside the rotor. The piezoelectric element would be expanded by electrical pulses and impacted on the rotor to generate rotary motion. For the SMA type, the frame components and the rotor were connected by the 4 artificial muscle wires (SMA wires). The rotational movement of rotors was obtained by changing the flowing sequence from four directions. Two types of rotors were reported, which were Circle-type and Two-hole-type. The MEMS microrobots were controlled by using pulse-type hardware neural networks integrated circuit to perform ant-like walking motions without any specialized software programs or analog digital converters. The Circle-type SMA microrobot with mounted bare IC chip was succeeded the hexapod walking locomotion. The locomotion speed of SMA microrobot with mounted IC chip was 2.4 mm/min.
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