Abstract

Energy and angular distributions of H1+, Ne+, and Ar+ backscattered from polycrystalline Nb and W targets were measured. The bombarding energy used was 15 keV. The pressure in the target region during bombardment was kept below 2×10−9 Torr. As an energy spectrometer we used an electrostatic spherical condenser. Surface impurities were detected by observing the binary scattering peaks of Ne+. The shape of the energy spectra of backscattered protons depends strongly on the surface cleanness and on the crystalline structure of the target.

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