Abstract

This study addresses low- and high-doped ultra-thin body and buried oxide silicon-on-insulator (UTBB-SOI) nFETs related to back biases and reliability. The low-doped device shows wider tuning range and lower subthreshold and gate leakage despite lower transconductance. Positive bias temperature instability in low-doped UTBB-SOI degraded lower than that in high-doped device.

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